Papers

2018

[71]
M. Serra-Garcia; V. Peri; R. Susstrunk; O. Bilal; T. Larsen et al. : Observation of a phononic quadrupole topological insulator; NATURE. 2018. DOI : 10.1038/nature25156.
[70]
M. Ghorbani; A. Sadaghiani; L. Villanueva; A. Kosar : Hydrodynamic cavitation in microfluidic devices with roughened surfaces; JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2018. DOI : 10.1088/1361-6439/aab9d0.
[69]
A. De Pastina; D. Maillard; L. Villanueva : Fabrication of suspended microchannel resonators with integrated piezoelectric transduction; MICROELECTRONIC ENGINEERING. 2018. DOI : 10.1016/j.mee.2018.02.011.

2017

[68]
M. Ghorbani; A. Mohammadi; A. R. Motezakker; L. G. Villanueva; Y. Leblebici et al. : Energy Harvesting in Microscale with Cavitating Flows; ACS Omega. 2017. DOI : 10.1021/acsomega.7b01204.
[67]
S. Marquez; M. Alvarez; J. A. Plaza; L. G. Villanueva; C. Dominguez et al. : Asymmetrically coupled resonators for mass sensing; Applied Physics Letters. 2017. DOI : 10.1063/1.5003023.
[66]
S. Yandrapalli; D. Ruffieux; L. G. Villanueva : Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS; IEEE Transactions On Nanotechnology. 2017. DOI : 10.1109/Tnano.2017.2701006.
[65]
T. Larsen; S. Schmid; S. Dohn; J. E. Sader; A. Boisen et al. : Position and mode dependent optical detection back-action in cantilever beam resonators; Journal Of Micromechanics And Microengineering. 2017. DOI : 10.1088/1361-6439/aa591e.

2016

[64]
M. Sansa; E. Sage; E. C. Bullard; M. Gely; T. Alava et al. : Frequency fluctuations in silicon nanoresonators; Nature Nanotechnology. 2016. DOI : 10.1038/Nnano.2016.19.

2015

[63]
A. Abazari; S. Safavi; G. Rezazadeh; G. Villanueva : Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures; Sensors. 2015. DOI : 10.3390/s151128543.
[62]
O. Vazquez-Mena; L. Gross; S. Xie; L. G. Villanueva; J. Brugger : Resistless nanofabrication by stencil lithography: A review; Microelectronic Engineering. 2015. DOI : 10.1016/j.mee.2014.08.003.

2014

[61]
L. G. Villanueva; S. Schmid : Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators; Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.113.227201.
[60]
Y. Tsaturyan; A. Barg; A. Simonsen; L. G. Villanueva; S. Schmid et al. : Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics; OPTICS EXPRESS. 2014. DOI : 10.1364/OE.22.006810.
[59]
S. Schmid; T. Bagci; E. Zeuthen; J. M. Taylor; P. K. Herring et al. : Single-layer graphene on silicon nitride micromembrane resonators; Journal of Applied Physics. 2014. DOI : 10.1063/1.4862296.
[58]
M. H. Matheny; M. Grau; L. G. Villanueva; R. B. Karabalin; M. C. Cross et al. : Phase Synchronization of Two Anharmonic Nanomechanical Oscillators; Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.112.014101.
[57]
T. Bagci; A. Simonsen; S. Schmid; L. G. Villanueva; E. Zeuthen et al. : Optical detection of radio waves through a nanomechanical transducer; Nature. 2014. DOI : 10.1038/nature13029.

2013

[56]
L. G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; A. V. Savu; K. Sidler et al. : Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography; Micromachines. 2013. DOI : 10.3390/mi4040370.
[55]
L. Jacot-Descombes; C. Martin-Olmos; M. R. Gullo; V. J. Cadarso; G. Mermoud et al. : Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release; Soft Matter. 2013. DOI : 10.1039/c3sm51923f.
[54]
T. Larsen; S. Schmid; L. G. Villanueva; A. Boisen : Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical Resonators; ACS Nano. 2013.
[53]
L. G. Villanueva; E. Kenig; R. B. Karabalin; M. H. Matheny; R. Lifshitz et al. : Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators; Physical Review Letters. 2013. DOI : 10.1103/Physrevlett.110.177208.
[52]
L. G. Villanueva; R. B. Karabalin; M. H. Matheny; D. Chi; J. E. Sader et al. : Nonlinearity in nanomechanical cantilevers; Physical Review B. 2013. DOI : 10.1103/Physrevb.87.024304.
[51]
M. H. Matheny; L. G. Villanueva; R. B. Karabalin; J. E. Sader; M. L. Roukes : Nonlinear Mode-Coupling in Nanomechanical Systems; Nano Letters. 2013. DOI : 10.1021/Nl400070e.

2012

[50]
G. Tosolini; L. G. Villanueva; F. Perez-Murano; J. Bausells : Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors; Review of Scientific Instruments. 2012. DOI : 10.1063/1.3673603.
[49]
E. Kenig; M. C. Cross; L. G. Villanueva; R. B. Karabalin; M. H. Matheny et al. : Optimal operating points of oscillators using nonlinear resonators; Physical Review E. 2012. DOI : 10.1103/Physreve.86.056207.
[48]
E. Kenig; M. C. Cross; R. Lifshitz; R. B. Karabalin; L. G. Villanueva et al. : Passive Phase Noise Cancellation Scheme; Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.264102.
[47]
R. B. Karabalin; L. G. Villanueva; M. H. Matheny; J. E. Sader; M. L. Roukes : Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams; Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.236101.
[46]
G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; V. Savu; K. Sidler et al. : All-stencil transistor fabrication on 3D silicon substrates; Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/9/095022.
[45]
J. Henriksson; L. G. Villanueva; J. Brugger : Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator; Nanoscale. 2012. DOI : 10.1039/C2NR30639E.
[44]
O. Vazquez Mena; T. Sannomiya; M. Tosun; G. Villanueva; A. V. Savu et al. : High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks; ACS Nano. 2012. DOI : 10.1021/nn301358n.
[43]
K. Sidler; G. Villanueva; O. Vazquez-Mena; V. Savu; J. Brugger : Compliant membranes improve resolution in full-wafer micro/nanostencil lithography; Nanoscale. 2012. DOI : 10.1039/c2nr11609j.
[42]
L. G. Villanueva; F. Fargier; T. Kiefer; M. Ramonda; J. Brugger et al. : Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing; Nanoscale. 2012. DOI : 10.1039/C2NR11983H.
[41]
C. Martin-Olmos; G. Villanueva; P. van der Wal; A. Llobera; N. de Rooij et al. : Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning; Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.

2011

[40]
L. G. Villanueva; R. B. Karabalin; M. H. Matheny; E. Kenig; M. C. Cross et al. : A Nanoscale Parametric Feedback Oscillator; Nano Letters. 2011. DOI : 10.1021/Nl2031162.
[39]
P. Ivaldi; J. Abergel; M. H. Matheny; L. G. Villanueva; R. B. Karabalin et al. : 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection; Journal of Micromechanics and Microengineering. 2011. DOI : 10.1088/0960-1317/21/8/085023.
[38]
G. Villanueva; C. Martin Olmos; O. Vazquez Mena; J. Montserrat; P. Langlet et al. : Localized Ion Implantation Through Micro/Nanostencil Masks; IEEE Transactions on Nanotechnology. 2011. DOI : 10.1109/TNANO.2010.2090171.
[37]
O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger : Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications; ACS Nano. 2011. DOI : 10.1021/nn1019253.
[36]
O. Vazquez-Mena; K. Sidler; V. Savu; C. W. Park; L. G. Villanueva et al. : Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections; IEEE Transactions on Nanotechnology (TNANO). 2011. DOI : 10.1109/TNANO.2010.2042724.

2010

[35]
G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells : Silicon microcantilevers with MOSFET detection; Microelectronic Engineering. 2010. DOI : 10.1016/j.mee.2009.11.125.
[34]
V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. : Mechanically tuneable microoptical structure based on PDMS; Sensors and Actuators a-Physical. 2010. DOI : 10.1016/j.sna.2010.02.025.
[33]
D. Caballero; G. Villanueva; J. A. Plaza; C. A. Mills; J. Samitier et al. : Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques; Journal of Nanoscience and Nanotechnology. 2010. DOI : 10.1166/jnn.2010.1737.
[32]
T. Kiefer; G. Villanueva; F. Fargier; F. G. Favier; J. Brugger : Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale; Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/50/505501.
[31]
T. Kiefer; G. Villanueva; F. Fargier; F. Favier; J. Brugger : The transition in hydrogen sensing behavior in non-continuous palladium films; Applied Physics Letters. 2010. DOI : 10.1063/1.3491263.
[30]
T. Kiefer; A. Salette; G. Villanueva; J. Brugger : Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/10/105019.
[29]
V. Savu; S. Neuser; G. Villanueva; O. Vazquez-Mena; K. Sidler et al. : Stenciled conducting bismuth nanowires; Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. DOI : 10.1116/1.3292630.

2009

[28]
T. Kiefer; G. Villanueva; J. Brugger : Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold; Physical Review E. 2009. DOI : 10.1103/Physreve.80.021104.
[27]
O. Vazquez-Mena; L. G. Villanueva; V. Savu; K. Sidler; P. Langlet et al. : Analysis of the blurring in stencil lithography; Nanotechnology. 2009. DOI : 10.1088/0957-4484/20/41/415303.
[26]
K. Pataky; L. G. Villanueva; A. Liani; O. Zgheib; N. Jenkins et al. : Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays; Radiation Research. 2009. DOI : 10.1667/RR1483.1.
[25]
C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. : Stress and aging minimization in photoplastic AFM probes; Microelectronic Engineering. 2009. DOI : 10.1016/j.mee.2008.12.033.

2008

[24]
G. Villanueva; J. A. Plaza; J. Montserrat; F. Perez-Murano; J. Bausells : Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces; Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.082.
[23]
D. Ramos; J. Tamayo; J. Mertens; M. Calleja; G. Villanueva et al. : Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits; Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/03/035503.
[22]
A. Errachid; C. A. Mills; M. Pla-Roca; M. J. Lopez; G. Villanueva et al. : Focused ion beam production of nanoelectrode arrays; Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2008. DOI : 10.1016/j.msec.2007.10.077.
[21]
V. J. Cadarso; A. Llobera; G. Villanueva; V. Seidemann; S. Buttgenbach et al. : Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators; Sensors and Actuators A-Physical. 2008. DOI : 10.1016/j.sna.2007.11.007.
[20]
V. J. Cadarso; A. Llobera; G. Villanueva; C. Dominguez; J. A. Plaza : 3-D modulable PDMS-based microlens system; Optics Express. 2008. DOI : 10.1364/OE.16.004918.
[19]
V. Akimov; E. Alfinito; J. Bausells; I. Benilova; I. C. Paramo et al. : Nanobiosensors based on individual olfactory receptors; Analog Integrated Circuits and Signal Processing. 2008. DOI : 10.1007/s10470-007-9114-0.
[18]
O. Vazquez Mena; G. Villanueva; V. Savu; K. Sidler; M. A. F. van den Boogaart et al. : Metallic Nanowires by Full Wafer Stencil Lithography; Nano Letters. 2008. DOI : 10.1021/nl801778t.
[17]
O. Vazquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger : Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching; Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.083.
[16]
C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. : Novel methods to pattern polymers for microfluidics; Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.052.
[15]
K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. : Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates; Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.069.
[14]
G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; K. Pataky et al. : Etching of sub-micrometer structures through Stencil; Microelectronic Engineering. 2008.
[13]
T. Kiefer; F. Favier; O. Vazquez; G. Villanueva; J. Brugger : A single nanotrench in a palladium microwire for hydrogen detection; Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/12/125502.

2007

[12]
G. Villanueva; J. A. Plaza; A. Sanchez; K. Zinoviev; F. Perez-Murano et al. : DRIE based novel technique for AFM probes fabrication; Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.078.
[11]
J. A. Plaza; K. Zinoviev; G. Villanueva; C. Dominguez : Novel cantilever design with high control of the mechanical performance; Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.111.

2006

[10]
G. Villanueva; J. A. Plaza; A. Sanchez-Amores; J. Bausells; E. Martinez et al. : Deep reactive ion etching and focused ion beam combination for nanotip fabrication; Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2006. DOI : 10.1016/j.msec.2006.01.002.
[9]
G. Villanueva; J. A. Plaza; E. Gonzalez; J. Bausells : Transfer of small structures by bonding; Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems. 2006. DOI : 10.1007/s00542-005-0041-7.
[8]
G. Villanueva; F. Perez-Murano; M. Zimmermann; J. Lichtenberg; J. Bausells : Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection; Microelectronic Engineering. 2006. DOI : 10.1016/j.mee.2006.01.223.
[7]
S. Sadewasser; G. Villanueva; J. A. Plaza : Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation; Review of Scientific Instruments. 2006. DOI : 10.1063/1.2219738.
[6]
S. Sadewasser; G. Villanueva; J. A. Plaza : Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy; Applied Physics Letters. 2006. DOI : 10.1063/1.2226993.
[5]
J. A. Plaza; K. Zinoviev; G. Villanueva; M. Alvarez; J. Tamayo et al. : T-shaped microcantilever sensor with reduced deflection offset; Applied Physics Letters. 2006. DOI : 10.1063/1.2345234.
[4]
A. Llobera; G. Villanueva; V. J. Cadarso; S. Buttgenbach; J. A. Plaza : Polymeric MOEMS variable optical attenuator; IEEE Photonics Technology Letters. 2006. DOI : 10.1109/Lpt.2006.886134.
[3]
G. Gomila; I. Casuso; A. Errachid; O. Ruiz; E. Pajot et al. : Advances in the production, immobilization, and electrical characterization of olfactory receptors for olfactory nanobiosensor development; Sensors and Actuators B-Chemical. 2006. DOI : 10.1016/j.snb.2005.11.083.

2005

[2]
C. A. Mills; E. Martinez; F. Bessueille; G. Villanueva; J. Bausells et al. : Production of structures for microfluidics using polymer imprint techniques; Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.087.

2004

[1]
G. Villanueva; J. Montserrat; F. Perez-Murano; G. Rius; J. Bausells : Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection; Microelectronic Engineering. 2004. DOI : 10.1016/j.mee.2004.03.021.