Conference Contributions

2018

[105]
H. Jia; X.-Q. Zheng; M. Faizan; T. Larsen; G. Villanueva et al. : Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation ; The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, Ireland, 21-25 January, 2018.

2017

[104]
A. H. Tran; T. Larsen : Fabrication of 2D Material Based NEMS Resonators.
[103]
A. Gerbino; A. De Pastina; F. Gallaire; C. Meinhart : FEM modeling of energy dissipation in SMRs ; Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.
[102]
D. Maillard; A. De Pastina : Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators ; Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.
[101]
M. Lucena Couto; A. De Pastina : Energy dissipation in Suspended Microchannel Resonators as function of channel off-axis placement ; Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.
[100]
K. Howell : Dielectric Transduction of NEMS ; 2017 NAMIS International Workshop, Freiburg, September 2017.
[99]
T. Larsen; C. C. Moreno; O. Vazquez-Mena : Assembly of Silicon Nitride Channels ; Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 - 22 September, 2018.
[98]
K. Howell; A. De Pastina; A. Lozzi; T. Larsen; M. Faizan et al. : Piezoelectric Nanoelectromechanical Systems. 2017-07-27. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017. DOI : 10.1109/TRANSDUCERS.2017.7994010.
[97]
A. Lozzi; A. De Pastina; L. G. Villanueva; E. T.-T. Yen : Release area confinement in Contour Mode Resonators. 2017. IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017.
[96]
A. De Pastina : Frequency stability of PZE actuated suspended micro-channel resonators ; NanoFluidics and NanoMechanics Workshop, Turin, September 14-15, 2017.
[95]
G. Villanueva; R. Karabalin; M. Matheny; R. Lifshitz; M. Cross et al. : Nonlinearities in NEMS ; 2017 IEEE International Ultrasonics Symposium (IUS), Washington DC, September 2017.
[94]
A. De Pastina; A. Fernández-Tenllado : Frequency stability of PZE actuated suspended micro-channel resonators.
[93]
G. Villanueva; R. Karabalin; M. Matheny; E. Kenig; R. Lifshitz et al. : Nonlinearities and Frequency Stability in NEMS ; 14th International Workshop on NanoMechanical Sensors, Kona, Hawaii, April 2017.
[92]
T. Larsen; F. Fantino; S. Stassi; A. Tran; C. Ricciardi et al. : Graphene Based Membrane Resonators ; Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.

2016

[91]
A. De Pastina; A. N. D. Aupée; T. Larsen; G. Villanueva : Parylene-Based Hollow Nanomechanical Resonators For Bioapplications ; 42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
[90]
K. Howell; W. Bashir; A. De Pastina; R. Matloub Aghdam; P. Muralt et al. : 50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators ; 42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
[89]
T. Larsen; P. R. Whelan; M. Di Gisi; P. Bøggildb; G. Villanueva : Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer ; 42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
[88]
A. Lozzi; E. T. T. Yen; G. Villanueva : Anchor Losses Dependence on Electrode Material in Contour Mode Resonators ; 2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016.
[87]
A. De Pastina; A. Fani; F. Gallaire; G. Villanueva : 3D FEM dissipation model of suspended micro channel resonators ; 5th Micro and Nano Flows Conference (MNF 2016), Milan, Italy, September 11-14, 2016.

2015

[86]
A. De Pastina; G. Villanueva : Fabrication of suspended micro-resonator integrated with PZE electrodes ; NanoBioTech-Montreux, Montreux, Switzerland, November 16-18, 2015.
[85]
A. De Pastina; G. Villanueva : Fabrication of suspended hollow micro-resonators integrated with PZE electrodes ; 18th Conference in NanoBioTech, Montreux, November 2015.
[84]
G. Villanueva : NEMS Oscillators - Future Challenges and Workarounds ; 15th IEEE Conference on Nanotechnology (IEEENano), Rome, July 2015.

2014

[83]
G. Villanueva; B. Amato; T. Larsen; S. Schmid; A. Boisen : Metal-Insulator Interface Losses in Multimaterial Resonators ; 11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.
[82]
L. G. Villanueva; B. Amato; T. Larsen; S. Schmid : Interface Losses In Multimaterial Resonators. 2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)', u'27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 632-635.
[81]
G. Villanueva; T. Larsen; s. schmid; J. Sader; A. Boisen : Laser Detection Back-Action in Cantilevers ; 40th International Conference on Micro- and Nano- Engineering (MNE), 2014, Lausanne, September, 2014.
[80]
G. Villanueva; T. Larsen; S. Schmid; J. E. Sader; A. Boisen : Position Dependent Optical Back-Action in Cantilever Resonators ; 11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.
[79]
T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. : Optical detection of radio waves through a nanomechanical transducer ; Frontiers in Optics Laser Science (FiO/LS 2014), 2014, Tucson, 2014.

2013

[78]
L. Amato; B. Amato; G. Villanueva; J. Emnéus; A. Heiskanen et al. : Pyrolysed carbon resonators – Fabrication and characterization ; 39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013.
[77]
T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. : Optical Detection of Radio-Frequency Signals via a Strongly Coupled Nano-Electromechanical System ; CLEO, San Diego, USA, 2013.
[76]
T. Larsen; S. Schmid; L. G. Villanueva; A. Boisen : Resonant Photothermal Spectroscopy Of Nanoparticulate Matter ; 10th International Workshop on Nanomechanical Cantilever Sensors (NMC), Stanford, 2013.
[75]
T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. : Optical Readout of Coupling Between a Nanomembrane and an LC Circuit at Room Temperature ; CLEO Europe - IQEC, Munich, Germany, 2013.

2012

[74]
G. Tosolini; L. G. Villanueva; F. Perez-Murano; J. Bausells : A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers. 2012. 26th IEEE International Conference on Microelectronic Test Structures (ICMTS), San Diego, USA, 2012. p. 55-60. DOI : 10.1109/ICMTS.2012.6190613.
[73]
L. G. Villanueva; E. Kenig; R. B. Karabalin; M. H. Matheny; R. Lifshitz et al. : Novel Oscillator Topologies ; NEMS Workshop, Barcelona, Spain, 2012.

2011

[72]
M. H. Matheny; L. G. Villanueva; R. B. Karabalin; J. E. Sader; M. L. Roukes : Control of Nonlinearity in a Doubly-Clamped Nanomechanical Beams ; IEEE International Frequency Control Symposium (IFCS), San Francisco, USA, 2011.
[71]
G. Tosolini; F. Perez-Murano; J. Bausells; L. G. Villanueva : Self sensing cantilevers for the measurement of (biomolecular) forces. 2011. 8th Spanish Conference on Electron Devices (CDE), Palma de Mallorca, Spain, 2011. p. 1-4. DOI : 10.1109/SCED.2011.5744171.
[70]
C. Martin-Olmos; L. G. Villanueva; A. Llobera; A. Voigt; G. Gruetzner et al. : Opto-thermal actuation in double layer polymer microcantilevers. 2011. Nano-Opto-Mechanical Systems (NOMS), San Diego, USA, 2011. DOI : 10.1117/12.897353.
[69]
J. Henriksson; L. G. Villanueva; J. Brugger : Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions. 2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787-790. DOI : 10.1109/TRANSDUCERS.2011.5969266.
[68]
L. G. Villanueva; R. B. Karabalin; M. H. Matheny; M. C. Cross; M. L. Roukes : Nonlinear dynamics in NEMS ; 2nd international workshop in NEMS, Toulouse, France, 2011.

2010

[67]
J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger : Pd-functionalized MEMS resonator for hydrogen gas sensing ; Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.
[66]
O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger : Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing ; Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.
[65]
J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger : Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure ; 7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.
[64]
T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger : Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing. 2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS'2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.
[63]
R. B. Karabalin; M. H. Matheny; L. G. Villanueva; X. L. Feng; S. C. Masmanidis et al. : Piezoelectric Nanomechanical Devices ; IEEE International Frequency Control Symposium (IFCS), Newport Beach, USA, 2010.
[62]
K. Sidler; O. Vazquez-Mena; L. G. Villanueva; V. Savu; J. Brugger : Flexible Membranes Improve Resolution in Stencil Lithography ; The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication , Anchorage, Alaska, U.S.A., June 1- 4, 2010.
[61]
O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; V. Savu; K. Sidler et al. : Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates ; The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.

2009

[60]
G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells : Silicon microcantilevers with MOSFET detection ; Trends in Nanotechnology (TNT), Oviedo, Spain, 2009.
[59]
O. Vázquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. : Analysis and Applications of Nanostructures Created by Stencil Lithography ; The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.
[58]
G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells : Silicon microcantilevers with MOSFET detection. 2009. 35th International Conference on Micro- and Nano- Engineering (MNE), Gent, Belgium, 2009. p. 1245-1247. DOI : 10.1016/j.mee.2009.11.125.
[57]
G. Tosolini; G. Villanueva; J. Bausells; A. García Loureiro; N. S. Iglesias et al. : Silicon microcantilevers with piezoresistive and MOSFET detection. 2009. 7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009. p. 428-31. DOI : 10.1109/SCED.2009.4800525.
[56]
V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. : Mechanically tuneable microoptical structure based on PDMS. 2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. DOI : 10.1016/j.sna.2010.02.025.
[55]
V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. : Stencilled Conducting Bismuth Nanowires. 2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.
[54]
G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger : Direct Etching of High Aspect structures through a Stencil. 2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.
[53]
O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. : Analysis and Applications of Nanostructures Created by Stencil Lithography. 2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.
[52]
K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger : Minimized Blurring in Stencil Lithography using a Compliant Membrane. 2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.
[51]
L. G. Villanueva; O. Vazquez-Mena; J. Montserrat; V. Savu; K. Sidler et al. : All through stencil MOSFET fabrication ; Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.
[50]
K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger : Minimized Blurring in Stencil Lithography using a Compliant Membrane ; The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.

2008

[49]
T. Kiefer; F. Favier; L. G. Villanueva; O. Vazquez Mena; A. Salette et al. : Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium ; NAMIS International autumn school, Tokyo, Japan, September 2008.
[48]
L. G. Villanueva; O. Vazquez Mena; T. Kiefer; J. Brugger : Direct fabrication of NIL stamps using Stencil Lithography ; Eurosensors XXII, Dresden, Germany, September 7-10, 2008.
[47]
G. Villanueva; C. Martin; O. Vazquez-Mena; J. Montserrat; P. Langlet et al. : Resistless ion implantation of sub-micron scale features through nano-stencil ; 34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
[46]
T. Kiefer; L. G. Villanueva; J. Brugger : Design and optimization of nanogap array sensors ; Eurosensors XXII, Dresden, Germany, September 7-10, 2008.
[45]
T. Kiefer; G. Villanueva; .. Brugger : Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale ; 34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
[44]
G. Villanueva; J. Brugger : Direct fabrication of NEMS by etching through Stencil ; Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.
[43]
P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva : Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks. 2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539-541. DOI : 10.1063/1.3120093.
[42]
V. J. Cadarso; A. Llobera; G. Villanueva; V. Seidemann; S. Buttgenbach et al. : Quad beam polymeric optomechanical systems. 2008. International Symposium on Optomechatronic Technologies, San Diego, USA, 2008. p. 72660T (12 pp.). DOI : 10.1117/12.807287.
[41]
C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. : Discontinuous Palladium Nanostructures for H2 Sensing. 2008. ECS Transactions, Hawaii, 2008. p. 457-463. DOI : 10.1149/1.2981151.
[40]
C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. : Stress and aging minimization in photoplastic AFM probes. 2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.
[39]
O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. : Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization. 2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807-811.
[38]
G. Villanueva; J. Brugger : Stencil Lithography: Quick and Clean ; Smart Systems Integration (SSI), Barcelona, Spain, 2008.
[37]
T. Kiefer; O. Vazquez Mena; K. Sidler Arnet; V. Fakhfouri; K. Pataky et al. : Research activities at LMIS1-EPFL ; 5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.
[36]
C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; R. Penner et al. : Discontinuous Palladium Nanostructures for H2 Sensing ; Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.
[35]
C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. : Stress and aging minimization in photoplastic AFM probes ; 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
[34]
O. Vazquez-Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart; J. Brugger : 100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization ; IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.

2007

[33]
O. Vázquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger : Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching ; 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
[32]
G. Villanueva; G. Rius; J. Montserrat; F. Perez-Murano; J. Bausells : Piezoresistive micro cantilevers for Biomolecular force detection. 2007. 6th Spanish Conference on Electron Devices (CDE), Sevilla, Spain, 2007. p. 212-215. DOI : 10.1109/SCED.2007.384029.
[31]
A. Llobera; G. Villanueva; V. J. Cadarso; V. Seidemann; S. Buttgenbach et al. : Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers. 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007. p. U544-U545. DOI : 10.1109/SENSOR.2007.4300321.
[30]
K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. : Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates. 2007. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
[29]
G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. : Etching of sub-micrometer structures through Stencil. 2007. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007.
[28]
C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. : Novel methods to pattern polymers for microfluidics. 2007. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
[27]
J. Bausells; G. Villanueva; F. Perez-Murano : Piezoresistive cantilevers for biomolecular detection ; 4th International Workshop on Nanomechanical Sensors (NMC), Montreal, Canada, 2007.
[26]
G. Villanueva; O. Vazquez-Mena; M. van den Boogaart; K. Sidler; V. Savu et al. : Etching of sub-micrometer structures through Stencil ; 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
[25]
T. Kiefer; F. Favier; O. Vazquez Mena; L. G. Villanueva; J. Brugger : Focused Ion Beam Engineered Nanogap in a Palladium Microwire as a Mechanical Switch for Hydrogen Detection ; 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

2006

[24]
G. Villanueva; G. Rius; J. Montserrat; F. Peerez-Murano; J. Bausells : Piezoresistive cantilevers for intermolecular force detection ; 3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.
[23]
G. Villanueva; J. A. Plaza; A. Sanchez; K. Zinoviev; F. Perez-Murano et al. : DRIE based novel technique for AFM probes fabrication. 2006. 32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006. p. 1132-1135. DOI : 10.1016/j.mee.2007.01.078.
[22]
G. Villanueva; F. Perez-Murano; M. Zimmermann; J. Lichtenberg; J. Bausells : Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection. 2006. Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Baltimore, USA, 2006. p. 1302-1305.
[21]
J. A. Plaza; K. Zinoviev; G. Villanueva; C. Dominguez : Novel cantilever design with high control of the mechanical performance. 2006. 32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006. p. 1292-1295. DOI : 10.1016/j.mee.2007.01.111.
[20]
J. Bausells; G. Villanueva; F. Perez-Murano; J. Lichtenberg; M. Zimmermann et al. : Development of a diagnosis tool based on the measurement of molecular interactions using CMOS-integrated piezoresistive microcantilevers. 2006. 3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006. p. 212-215.

2005

[19]
E. Pajot; J. Minic; Y. Gorojankina; R. Salesse; J. Bausells et al. : Development of an artificial nose integrating NEMS and biological olfactory receptors ; 5th Spanish Conference on Electron Devices (CDE), Tarragona, 2005.
[18]
J. A. Plaza; G. Villanueva; A. Sanchez; K. Zinoviev : Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE ; 19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.
[17]
A. Errachid; C. A. Mills; M. Pla; E. Martínez; G. Villanueva et al. : Focused ion beam production of nanoelectrode arrays ; 19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.
[16]
G. Villanueva; J. A. Plaza; A. Sanchez-Amores; J. Bausells; E. Martinez et al. : FIB and DRIE combination for nanotip fabrication. 2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 443-446. DOI : 10.1109/SCED.2005.1504477.
[15]
G. Villanueva; F. Perez-Murano; M. Zimmermann; J. Lichtenberg; J. Bausells : Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection. 2005. 31st International Conference on Micro- and Nano- Engineering (MNE), Vienna, Austria, 2005. p. 1302-1305. DOI : 10.1016/j.mee.2006.01.223.
[14]
G. Villanueva; J. Bausells; J. Montserrat; F. Perez-Murano : Polysilicon piezoresistive cantilevers for intermolecular force detection. 2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 495-498.
[13]
G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. : Artificial nose integrating biological olfactory receptors and NEMS. 2005. International Symposium on Olfaction and Electronic Nose (ISOEN), Barcelona, Spain, 2005. p. 529-532.
[12]
G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. : Development of an artificial nose integrating NEMS and biological olfactory receptors. 2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, SPAIN, 2005. p. 529-532. DOI : 10.1109/SCED.2005.1504506.
[11]
M. Duch; J. A. Plaza; G. Villanueva; R. Perez; J. Esteve et al. : Fabrication and characterization of Co-Ni magnetic cantilevers. 2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 201-204. DOI : 10.1109/SCED.2005.1504357.

2004

[10]
G. Villanueva; J. A. Plaza; A. Sanchez-Amores; J. Bausells; E. Martinez et al. : DRIE and FIB combination for nanotip fabrication ; 30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004.
[9]
A. Errachid; E. Martinez; G. Villanueva; J. Bausells; J. Samitier : Fabrication of nanoelectrodes combining standard microfabrication processes and focused ion beam (FIB) ; Trends in Nanotechnology (TNT), Segovia, 2004.
[8]
A. Errachid; E. Araya; F. Bessueille; C. A. Mills; G. Villanueva et al. : Immobilization of streptavidin on aminoterminated functionalised gold using microcontact printing to obtain biosensors ; 3rd International Conference on Nanoimprint and NanoTechnologies (NNT), Wien, 2004.
[7]
M. Duch; J. A. Plaza; G. Villanueva; R. Perez; J. Esteve et al. : Co-Ni material for magnetic cantilevers ; 18th European Conference on Sensors and Actuators (Eurosensors), Rome, 2004.
[6]
G. Villanueva; J. A. Plaza; E. Gonzalez; J. Bausells : Transfer of small structures by bonding. 2004. International Workshop on Wafer Bonding for MEMS (WWB), Halle, 2004. p. 455-461. DOI : 10.1007/s00542-005-0041-7.
[5]
C. A. Mills; E. Martinez; F. Bessueille; G. Villanueva; J. Bausells et al. : Production of structures for microfluidics using polymer imprint techniques. 2004. 30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004. p. 695-700. DOI : 10.1016/j.mee.2004.12.087.
[4]
J. Lichtenberg; J. Bausells; A. Baron; M. Crowley; L. McDonnell et al. : CMOS-integrated, cantilever-based sensor devices: the Biofinger project. 2004. 1st International Workshop on Nanomechanical Sensors (NMC), Madrid, 2004. p. 212-215.
[3]
G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. : Nanosensors based on biological olfactory receptors ; 8th European Conference on Micro&Nanoscale Technologies for Biosciences (Nanotech), Montreux, 2004.

2003

[2]
G. Villanueva; G. Rius; J. Bausells; J. Montserrat; F. Perez-Murano : E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection ; 4th Spanish Conference on Electron Devices (CDE), Calella, 2003.
[1]
G. Villanueva; J. Montserrat; F. Perez-Murano; G. Rius; J. Bausells : Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection. 2003. 29th International Conference on Micro- and Nano- Engineering (MNE), London, 2003. p. 480-486. DOI : 10.1016/j.mee.2004.03.021.